The exosure failed Rcon error : error code (00216) beam-balance : Beam balance prevented by the range of pulse heights
( error code = 44300 , error category = 07
. fatal device cannot recover ) click unload to automatically unload the plate from the drum . resubmit the speration from the workflow workstation .
This message appear every day moring and i expose averge 10 to 12 plate with this messge then the machine started expose with no error .. What is the problem ???
( error code = 44300 , error category = 07
. fatal device cannot recover ) click unload to automatically unload the plate from the drum . resubmit the speration from the workflow workstation .
This message appear every day moring and i expose averge 10 to 12 plate with this messge then the machine started expose with no error .. What is the problem ???